Diffusion Furnace Heating Elements

Pacific Thermo Saturn line of Direct Replacement Heating Elements for semiconductor and solar cell diffusion furnaces are available in a wide range of sizes with inside diameters ranging from 4 to 24 inches (101 to 610mm).

Our diffusion furnace heating elements are available for horizontal and vertical furnace units.

For replacement furnace heating elements, the physical and electrical configuration of the Sirius heating elements are the same as the OEM furnace element for easy installation.

If you need a diffusion furnace heating element for a custom application Pacific Thermo offers custom designed elements for your specific applications.

The Sirius Direct Replacement Heating Elements offer many advantages including:
– Lower Initial Cost
– Reduced Cost of Operation Over the Life of the Element
– Reduced Power Consumption
– Reduced Impact on HVAC/Chilled Water
– Improved Element Design
– Higher Continuous Operating Temperature
– Increased Wafer Processing in Many Applications
– Longer Element Lifetime
– Extended Warranty

Learn more about our diffusion furnace heating elements.

If you have questions or would like to talk with us about replacement heating elements, email us at sales@pacificthermo.com or call us at 408-259-1289