Pacific Thermo Diffusion Furnaces

Large Production to Small R&D or University Systems

Semiconductor or Solar Cell Production

Horizontal and Vertical Furnaces

Competitive Pricing, Reliable Delivery, Total Support

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Diffusion Furnace Refurbishing and Reconditioning

Client Systems

 

Increase processing capability
Process reconfiguration
Automatic loading system addition
Control upgrades...

Previously Owned Furnaces

 

Significant savings over new systems
Major brands - Thermco, Tempress, Bruce...
Configured to clients processing requirements

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refurbished bruce diffusion furnace system

Refurbished Thermco diffusion furnace

Refurbished Thermco Diffusion Furnace View 2

Saturn™ Replacement Heating Elements
For Semiconductor and Solar Industries

vertical heating elementReplacement diffusion furnace heating elements

For all furnace makes

Temperatures up to 1400° C

Reduced Cost of Operation
   (10-20% Less Power Consumption)

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Pacific Thermo Products, Inc. is a privately owned U.S. corporation headquartered in San Jose, Ca. that has been serving the semiconductor and solar industries since 1973.

We take our ability to be flexible seriously as it has proven to be the best way to serve the ever-changing requirements of our industry. To better support our customers in SE Asia Pacific Thermo opened a sales, service and manufacturing facility in Wuxi, China in 2005.

Throughout the world, microelectronics and solar cell manufacturers have come to rely on Pacific Thermo Products for state-of-the-art equipment, reliable delivery, total support and competitive pricing.

Diffusion Furnace Products and Accessories by Pacific Thermo

Pacific Thermo Product Divisions

Pacific Thermo is a worldwide supplier for state-of-the-art equipment used in the manufacture of solar cells. Our SolaReactor PECVD and POCl3 systems are widely used for small R&D to large production run requirements.

Pacific Thermo Products Furnace Division has supplied over 250 systems worldwide configured as Atmospheric, LPCVD, PECVD, High Temperature and Special Applications in both horizontal and vertical configurations.

Pacific Thermo Products Solar Equipment Division supplies in-line PECVD Anti-Reflective coating and POCl3 deposition systems used worldwide in the solar cell industry.

Pacific Thermo Products Refurbished Furnace Division has in-house facilities for refurbishing or reconfiguring a customer’s diffusion furnace or PECVD system. This includes upgrading to larger wafer processing capability, process reconfiguration, adding automatic loading systems and upgrading controls.

Pacific Thermo Products Element Division is a major supplier of heating elements to end-users worldwide as well as many of the furnace manufacturers and rebuilders.

Pacific Thermo (Wuxi) Electronic Equipment Co., Ltd. is a fully staffed sales and service facility that offers one of the most complete service and calibration facilities for all brands of mass flow controllers in China, all our work is performed using primary standards with traceable accuracy to NISST/ANSI.

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Pacific Thermo Global Support

Factory trained service engineers are located in San Jose & Los Angeles, CA (USA) Wuxi, Shanghai and Beijing (China), Taipei (Taiwan), Paris (France) and Mumbai, Hyderabad and Calcutta (India) providing 24/7 support of equipment.

Start-Up Assistance, Maintenance Contracts and Process Support programs are available.

Specific production sensitive replacement parts are stocked at our San Jose, CA, Mumbai, India and Wuxi, China facilities and at certain local distributor sites.

Global Support Office Locations

Pacific Thermo References

Pacific Thermo  has a long list of commercial and university references.

We take pride in working closely with every customer and have established a strong reputation for extraordinary support, both technical and process, on our equipment.

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