The SolaReactorTM offers leading edge technology Plasma Enhanced Chemical Vapor Deposition (PECVD) and liquid source deposition systems designed to optimize throughput and enhance cell efficiency in the production of photovoltaic films
Designed specifically for the solar industry, the SolaReactorTM deposits a superior PECVD AR film and low sheet resistance liquid source deposition to produce highly efficient solar cells. The SolaReactorTM provides increased yields and superior reflective value films, compared with atmospheric TiNitride process. The SolarReactorTM includes a baseline process to produce one of the most efficient AR coatings available. The liquid source configuration controls the sheet resistance to a high degree of accuracy.