Low Pressure Liquid Source Deposition System

Project Description

Pacific Thermo Systems Low Pressure Liquid Source Deposition System is a unique design that draws the source vapors off the liquid source rather than bubbling a gas thru the liquid. This design gives superior film deposition, greatly enhanced film uniformity, superior resistivity control and significantly reduced amount of source liquid usage.

When combined with our DirectInject™ Steam Generator System the process tube, boats and SiC paddle may be cleaned without removing them from the furnace.