About Pacific Thermo Systems, Inc.

Pacific Thermo Systems, Inc. is a privately owned U.S. corporation headquartered in San Jose, Ca. that has been serving the semiconductor and solar industries since 1973. We take our ability to be flexible seriously as it has proven to be the best way to serve the ever-changing requirements of our industry. To better support our customers in SE Asia Pacific Thermo Systems opened a sales, service and manufacturing facility in Wuxi, China in 2005.

Throughout the world, microelectronics and solar cell manufacturers have come to rely on Pacific Thermo Systems for state-of-the-art equipment, reliable delivery, total support and competitive pricing.

Pacific Thermo Systems is a worldwide supplier for state-of-the-art equipment used in the manufacture of solar cells. Our SolaReactor PECVD and POCl3 systems are widely used for small R&D to large production run requirements.

Pacific Thermo Systems Furnace Division has supplied over 250 systems worldwide configured as Atmospheric, LPCVD, PECVD, High Temperature and Special Applications in both horizontal and vertical configurations.

Pacific Thermo Systems Solar Equipment Division supplies Anti-Reflective coating and POCl3 deposition systems used worldwide in the solar cell industry.

Pacific Thermo Systems Refurbished Furnace Division has in-house facilities for refurbishing or reconfiguring a customer’s diffusion furnace or PECVD system. This includes upgrading to larger wafer processing capability, process reconfiguration, adding automatic loading systems and upgrading controls.

Pacific Thermo Systems Element Division is a major supplier of heating elements to end-users worldwide as well as many of the furnace manufacturers and rebuilders.

We certainly appreciate your interest Pacific Thermo Systems products and hope you will not hesitate to contact us if we can offer futher assistance or information. Click to see a partial listing of Pacific Thermo Systems globally distributed customers.